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Cavity optoelectromechanical regenerative amplification
Cavity optoelectromechanical regenerative amplification Instrumentation and Detectors
2011/8/2
Cavity optoelectromechanical regenerative amplification.
This paper presents a novel hybrid CMOS/MEMS tilt sensor with a 5∘ resolution over a 300∘ range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a sh...