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Preface to Topical Papers on Crystallization of Silicon Using Laser Annealing and Its Application to Electronic Device Fabrication.
Recently, we have demonstrated high average-power SHG generation by LD-pumped kHz-class pulsed Nd:YAG laser. Using this technique, we have developed a green laser for the YAG Laser Annealing System. W...
Stress evolution during deposition of 50 nm Au thin films by thermal evaporation in a UHV system and then stress modification during thermal vacuum annealing have been performed. For stress measuremen...
Ohmic contacts to AlGaN/GaN heterostructures which have low contact resistance and good surface morphology are required for the development of high temperature, high power and high frequency electron...
We analyze the effect of the laser annealing on the crystallization of Er3+ doped amorphous Al2O3 thin films deposited on the silica-on-silicon substrate. These thin films were prepared by the microwa...
With reactive low voltage ion plating technique, ITO (indium oxide doped with tin) films were deposited on glass substrates by using ITO pellet with a composition of 90 wt.% 1n203 and 10 wt.% Sn02 wit...
期刊信息 篇名 Annealing effect on electrical properties of high-k MgZnO film on silicon 语种 英文 撰写或编译 作者 Liang J,Wu HZ(吴惠桢),Chen NB,Xu TN 第一作者单位 刊物名称 Semiconductor Science and Technology 页面 20, L1-L5 2005 (校样...
This work presents optical and structural characterization of europium and palladium doped titanium dioxide thin films prepared by modified magnetron sputtering. The metallic Eu and Pd dopants have be...
The paper presents the results of investigations involving the influence of aging and annealing of the sol films on the final parameters of the obtained silica films. Both technological process and me...
The effect of annealing at 720–920 K under enhanced pressure (up to 1.1 GPa) in argon ambient on electrical properties of the surface layer of the Czochralski-grown silicon (Cz-Si) subjected to neutro...
Multiple-beam Fizeau fringes are used to study the changes in optical parameters of annealed Nylon 66 fibers. Changes in the refractive indices and birefringence of skin and core have been measured in...

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