搜索结果: 1-1 共查到“激光与微波医学防护学 Debris”相关记录1条 . 查询时间(0.046 秒)
Diagnostics of Debris from Laser-Produced Tin Plasma with Droplet Target for EUV Light Source
EUV Debris Laser-produced plasma
2009/6/1
In the development of extreme ultraviolet (EUV) light source for EUV lithography systems by laser-produced plasma (LPP), mass-limited targets such as a micro-droplet were considered as promising targe...