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Extremely Short Period Melting and Solidification of Si Film in Laser Annealing and Properties of Poly-Si Film
Laser annealing Supercooling Phase transformation
2009/6/9
Extremely short period melting and solidification of Si thin film induced by laser annealing is observed by in-situ monitoring techniques of transient reflectance and conductance measurements. The tem...
Preface to Topical Papers on Crystallization of Silicon Using Laser Annealing and Its Application to Electronic Device Fabrication
Silicon Laser Annealing Electronic Device Fabrication
2009/6/9
Preface to Topical Papers on Crystallization of Silicon Using Laser Annealing and Its Application to Electronic Device Fabrication.
High Pulse-Energy Green Laser for Laser Annealing System by LD-pumped Nd:YAG Laser
Intra-cavity Annealing SHG LD-pumped
2009/6/1
Recently, we have demonstrated high average-power SHG generation by LD-pumped kHz-class pulsed Nd:YAG laser. Using this technique, we have developed a green laser for the YAG Laser Annealing System. W...
Effect of pulse CO2 laser annealing on the crystallization of Er3+ doped Al2O3 thin film to a silica-on-silicon substrate
Laser annealing Alumina thin film Photoluminescence spectrum
2011/12/7
We analyze the effect of the laser annealing on the crystallization of Er3+ doped amorphous Al2O3 thin films deposited on the silica-on-silicon substrate. These thin films were prepared by the microwa...
Electrical Characteristics of Si Doped with Sb by Laser Annealing
Laser annealing LID doping Silicon devices Sb dopants
2010/4/13
Laser induced diffusion of antimony in silicon was obtained using a Nd:YAG pulsed laser. The irradiation of antimony-coated silicon by laser beam allowed melting and diffusion of antimony inside the s...