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Deposited indium-tin-oxide (ITO) transparent conductive films by reactive low-voltage ion plating (RLVIP) technique
ITO film RLVIP Optical transmittance Infrared reflectance Sheet resistance
2011/12/7
Indian-tin-oxide ITO transparent conductive films were deposited by the Reactive low-voltage ion plating (RLVIP) technique. CO2 and O2 gases were used as reactive gases coming into the vacuum. The eff...
Vacuum annealing effects on properties of ITO films prepared by reactive low voltage ion plating technique
ITO film RLVIP Annealing Infrared reflectance Optical transmittance Sheet Resistance
2011/12/7
With reactive low voltage ion plating technique, ITO (indium oxide doped with tin) films were deposited on glass substrates by using ITO pellet with a composition of 90 wt.% 1n203 and 10 wt.% Sn02 wit...