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The Study of Deep-level Emission Center in ZnO Films Grown on c-Al2O3 Substrates
ZnO MOCVD UV emission deep-level emission
2010/7/16
ZnO films were grown on c-Al2O3 substrates by metal-organic chemical vapor deposition
(MOCVD). Thermal annealing was performed at 700℃ in growth conditions and in oxygen
atmosphere for 30minutes. Th...