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Ventilation Control of Air Pollutant during Preventive Maintenance of a Metal Etcher in Semiconductor Industry
Cleanroom Pollutant dispersion Ventilation Indoor air pollutio
2016/3/30
Ventilation control efficiency of air pollutant emitted from a type P5000 metal etcher (Applied
Materials, Inc.) during preventive maintenance was investigated in this study. Sulfur hexafluoride
(SF...